Micro lens imprinted on Pyrex glass by using amorphous Ni-P alloy mold

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 873-876

  Mekaru, Harutaka ^a   Tsuchida, Tomoyuki ^b   Uegaki, Jun ichi ^b   Yasui, Manabu ^c   Yamashita, Michiru ^d   Takahashi, Masaharu ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Elionix Inc   (Japan)

^c KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^d HYOGO PREFECTURAL INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Amorphous Ni P alloy; FIB lithography; Micro lens; Nanoimprint; Pyrex glass

Indexed keywords

AMORPHOUS ALLOYS; MICROLENSES; MOLDS; NANOIMPRINT LITHOGRAPHY; NICKEL ALLOYS;

MICRO LENS; PYREX GLASS;

GLASS;

AMORPHOUS MATERIALS; GLASS; LITHOGRAPHY;

EID: 44149102952     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.031     Document Type: Article

References (5)

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5. Mekaru H., Kitadani T., Tamashita M., and Takahashi M. J. Vac. Sci. Technol. A 25 (2007) 1025