Multilayered LiNbO3 actuator for XY-stage using a shear piezoelectric effect

Sensors and Actuators, A: Physical

Volumn 144, Issue 2, 2008, Pages 337-340

  Matsunami, Go ^a   Kawamata, Akito ^a   Hosaka, Hiroshi ^a   Morita, Takeshi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Atomic force microscope; Lithium niobate (LiNbO3); Piezoelectric single crystal; Precise positioning

Indexed keywords

ATOMIC FORCE MICROSCOPY; HYSTERESIS; LITHIUM COMPOUNDS; MICROSTRUCTURE; PIEZOELECTRIC MATERIALS; VIBRATION ANALYSIS;

LITHIUM NIOBATE; MULTILAYERED ACTUATOR; PIEZOELECTRIC SINGLE CRYSTAL; PRECISE POSITIONING;

ACTUATORS;

EID: 43749110464     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.02.006     Document Type: Article

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