Micro jet array heat sink for power electronics

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 165-170

  Stefanescu, S ^a   Mehregany, M ^a   Leland, J ^a   Yerkes, K ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

JETS; MOSFET DEVICES; POWER ELECTRONICS; REACTIVE ION ETCHING;

DEEP REACTIVE ION ETCHING (DRIE); MICRO JET ARRAY HEAT SINKS;

HEAT SINKS;

EID: 0032649453     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746797     Document Type: Conference Paper

References (5)