Three-dimensional measurement by tilting & moving objective lens in CD-SEM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5038 II, Issue , 2003, Pages 1089-1094

  Kimura, Kouji ^a   Abe, Kazuo ^a   Tsuruga, Yasuko ^a   Suzuki, Hitoshi ^a   Kochi, Nobuo ^a   Koike, Hirotami ^a   Yamazaki, Yuichiro ^b  

^a TOPCON CORPORATION   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

3D measurement; CD SEM; Electro magnetic optical system

Indexed keywords

ELECTRON BEAMS; IMAGE PROCESSING; IMAGE QUALITY; MAGNETOOPTICAL DEVICES; OPTICAL SYSTEMS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; THREE DIMENSIONAL;

CRITICAL DIMENSION-SCANNING ELECTRON MICROSCOPY; ELECTRO-MAGNETIC OPTICAL SYSTEM; THREE-DIMENSIONAL MEASUREMENT; TILTING AND MOVING OBJECTIVE LENS;

ELECTRON DEVICES;

EID: 0141834906     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.483687     Document Type: Conference Paper

References (2)

1. International SEMANTIC "International Technology Roadmap for 2001 Edition and 2002 update"
2. E. Munro "Calculation of the Optical Properties of Combined Magnetic Lenses and Deflection System with Superimposed Fields" Optik Vol.39 450-466 (1974)