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Volumn 96, Issue 4, 2004, Pages 2278-2285
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Characterization of aluminum oxyfluoride barrier in magnetic tunnel junctions
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM COMPOUNDS;
DEPOSITION;
ELECTRIC PROPERTIES;
ELECTRODES;
INSULATION;
MAGNETORESISTANCE;
MAGNETRON SPUTTERING;
OXIDATION;
PLASMAS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
MAGNETIC TUNNEL JUNCTIONS (MTJ);
TUNNEL BARRIERS;
TUNNELING MAGNETORESISTANCE (TMR);
TUNNEL JUNCTIONS;
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EID: 4344618145
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1771826 Document Type: Article |
Times cited : (16)
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References (10)
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