A simple, robust, bias-free method of calculating CD-SEM resolution

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5375, Issue PART 1, 2004, Pages 244-253

  Rosenberg, Ira ^a  

^a Soluris Inc   (United States)

Author keywords

Measurement repeatability; Metrology; Resolution; Scanning electron microscopy

Indexed keywords

CRITICAL DIMENSION (CD); MEASUREMENT REPEATABILITY; MODULATION TRANSFER FUNCTIONS; SPATIAL FREQUENCY CURVE;

ABERRATIONS; ALGORITHMS; BANDWIDTH; FOURIER TRANSFORMS; IMAGE ANALYSIS; LIGHT; MEASUREMENTS; OPTICAL RESOLVING POWER; PARAMETER ESTIMATION; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; SIGNAL PROCESSING; SIGNAL TO NOISE RATIO; SPECTROSCOPIC ANALYSIS;

MACHINE COMPONENTS;

EID: 4344617178     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.535295     Document Type: Conference Paper

References (6)

1. M. Sato, "Resolution," in Handbook of Charged Particle Optics, J. Orloff, ed., CRC Press, Boca Raton, FL, pp. 319-361 (1997) and references therein. Although stressing the information passing methods earlier presented in articles by Orloff and Sato, it also serves as a review that includes many of the concepts mentioned here.
2. E.g., J. Frank, "A Practical Resolution Criterion in Optics and Electron Microscopy," Optik 48, 25-34 (1975); G. F. Lorusso and D. C. Joy, "Experimental Resolution Measurement in Critical Dimension Scanning Electron Microscope Metrology," Scanning, 25, 175-180 (2003), and other references therein.
3. E.g., J. Frank, "A Practical Resolution Criterion in Optics and Electron Microscopy," Optik 48, 25-34 (1975); G. F. Lorusso and D. C. Joy, "Experimental Resolution Measurement in Critical Dimension Scanning Electron Microscope Metrology," Scanning, 25, 175-180 (2003), and other references therein.
4. th Ed., Cambridge University Press, Cambridge, United Kingdom, 1980.
5. C.M. Sparrow, Astrophysical Journal 44, 76 (1916).
6. One could start with references 1 or 3, above.