Integrated MEMS optical flying head with lens positioning actuator for small form factor optical data storage

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 429-437

  Kim, Seong Hyok ^a   Yee, Youngjoo ^a   Choi, Junghoon ^a   Kwon, Hyouk ^a   Ha, Man Hyo ^a   Oh, Changhoon ^a   Bu, Jong Uk ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

Lens positioning actuator; Magneto optical recording; MEMS; Optical data storage; Optical flying head (OFH); Vertical actuator

Indexed keywords

ACTUATORS; ELECTRIC COILS; INTEGRATED CIRCUITS; LENSES; MAGNETIC FIELD MEASUREMENT; OPTICAL DATA STORAGE; POSITION CONTROL; SILICON SENSORS; SOFTWARE PROTOTYPING; TORSIONAL STRESS;

LENS POSITIONING ACTUATOR; MAGNETO-OPTICAL RECORDING; OPTICAL FLYING HEAD (OFH); VERTICAL ACTUATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 4344612054     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.12.024     Document Type: Article

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