Analysis of recoil force during Nd : YAG laser ablation of silicon

Applied Physics A: Materials Science and Processing

Volumn 79, Issue 4-6, 2004, Pages 1341-1344

  Lee, D J ^a   Jeong, S H ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CANTILEVER BEAMS; DYE LASERS; ELASTIC MODULI; IONIZATION; LASER PULSES; MATHEMATICAL MODELS; MICROMETERS; NATURAL FREQUENCIES; SHOCK WAVES; SILICON;

DIGITAL OSCILLOSCOPES; NANOSECOND PULSES; PROBE BEAMS; RECOIL FORCES;

LASER ABLATION;

EID: 4344585405     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2767-y     Document Type: Conference Paper

References (13)

1. S.I. Anisimov: Sov. Phys. JETP 27, 182 (1968)
2. V.A. Vatanov, F.V. Bunkin, A.M. Prokhorov, V.B. Fedorov: Sov. Phys. JETP 36, 311 (1973)
3. M. von Allmen, A. Blatter: Laser-Beam Interactions with Materials, 2nd edn. (Springer, Berlin, Heidelberg 1995) p. 130
4. D. Bäuerle: Laser Processing and Chemistry, 3rd edn. (Springer, Berlin, Heidelberg 2000) p. 201
5. V. Semak, A. Matsunawa: J. Phys. D: Appl. Phys. 30, 2541 (1997)
6. X. Chen, H.X. Wang, J. Phys. D: Appl. Phys. 34, 2637 (2001)
7. D.W. Gregg, S.J. Thomas: J. Appl. Phys. 37, 2787 (1966)
8. L.I. Kuznetsov: J. Quantum Electron. QE-23, 1035 (1993)
9. L.I. Kuznetsov: Proc. SPIE 2703, 563 (1996)
10. W.T. Thomson, M.D. Dahleh: Theory of Vibration with Applications, 5th edn. (Prentice-Hall, Upper Saddle River, NJ 1998) p. 90
11. M. Madou: Fundamentals of Microfabrication (CRC, Boca Raton, FL 1997) p. 159
12. X.L. Mao, R.E. Russo: Appl. Phys. A: Mater. Sci. Process. 64, 1 (1997)
13. J.H. Yoo, S.H. Jeong, R. Greif, R.E. Russo: J. Appl. Phys. 88, 1638 (2000)