Relevance of a midinfrared cavity ring-down diagnostic in the study of a dusty SiH4 plasma

IEEE Transactions on Plasma Science

Volumn 32, Issue 2 II, 2004, Pages 709-715

  Remy, J ^a   Hemerik, M M ^b   Kroesen, G M W ^a   Stoffels, W W ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RING DOWN SPECTROSCOPY; COMPLEX PLASMA; DETUNING;

CONTINUOUS WAVE LASERS; DUST; LASER TUNING; LIGHT ABSORPTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR LASERS; SILANES; SOLAR CELLS; SPECTROSCOPY;

PLASMA DIAGNOSTICS;

EID: 4344579354     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2004.826133     Document Type: Article

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