Two-dimensional cylindrical plasma at low gas pressure

Plasma Sources Science and Technology

Volumn 17, Issue 2, 2008, Pages

  Godyak, Valery ^a   Sternberg, Natalia ^b  

^a OSRAM SYLVANIA   (United States)

^b CLARK UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BOUNDARY LAYERS; IONIZATION; PLASMA DENSITY; SOLUTIONS;

COSINE DISTRIBUTION; ION EJECTING ANGLES; PLASMA CYLINDERS; PLASMA DENSITY DISTRIBUTION;

PLASMA COLLISION PROCESSES;

EID: 43149122003     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/2/025004     Document Type: Article

References (13)

1. Schottky W 1924 Phys. Z. 25 635
2. Kino G S and Shaw E K 1966 Phys. Fluids 9 587
3. Fruchtman A, Makrinich G and Ashkenazy J 2005 Plasma Sources Sci. Technol. 14 152
4. Self S A and Ewald H N 1966 Phys. Fluids 9 2486
5. Godyak V A and Sternberg N 1990 IEEE Trans. Plasma Sci. 18 159
6. Self S A 1963 Phys. Fluids 6 1762
7. Godyak V A 1986 Soviet Radio Frequency Discharge Research (Falls Church, VA: Delphic Associates)
8. Godyak V A and Ganna A S 1979 Sov. J. Plasma Phys. 5 376
9. Kolobov V I and Godyak V A 1995 IEEE Trans. Plasma Sci. 23 503
10. Tsendin L D 1995 Plasma Sources Sci. Technol. 4 200
11. Kortshagen U, Bush C and Tsendin L D 1995 Phys. Rev E 51 6063
12. Godyak V A 2006 IEEE Trans. Plasma Sci. 34 755
13. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Material Processing (New York: Wiley)