Saving energy in the make-up air unit (MAU) for semiconductor clean rooms in subtropical areas

Energy and Buildings

Volumn 40, Issue 8, 2008, Pages 1387-1393

  Tsao, Jhy Ming ^a   Hu, Shih Cheng ^a   Chan, David Yih Liang ^b   Hsu, Rich Tsung Chi ^b   Lee, Jane Car Cheng ^b  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Clean room HVAC system; Energy conservation; Make up air unit (MAU)

Indexed keywords

AIR CONDITIONING; CLEAN ROOMS; ELECTRIC POWER UTILIZATION; REQUIREMENTS ENGINEERING; SEMICONDUCTOR DEVICE MANUFACTURE; SYSTEMS ANALYSIS; WASTE HEAT UTILIZATION;

CLEAN ROOM HVAC SYSTEMS; HEAT RECOVERY FUNCTIONS; MAKE UP AIR UNIT;

ENERGY CONSERVATION;

EID: 43049167213     PISSN: 03787788     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.enbuild.2007.12.005     Document Type: Article

References (8)

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