Energy saving in semiconductor fabs by out-air handling unit performance improvement

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue 1, 2000, Pages 293-296

  Suzuki, Hirokazu ^a   Hanaoka, Hideo ^a   Ohkubo, Yoshinori ^a   Yamazaki, Yoshio ^a   Shirai, Yasuyuki ^a   Ohmi, Tadahiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR CONDITIONING; CONDENSATION; COOLING SYSTEMS; ENERGY CONSERVATION; ENERGY UTILIZATION; HEAT EXCHANGERS; HEAT TRANSFER; MOISTURE; REFRIGERATION;

AIR-HANDLING UNIT (AHU); SEMICONDUCTOR FABS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034583838     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. A proposal for energy saving in semiconductor fabs
2. Studies on characteristics of heat-exchangers with fins and its design