Modeling and characterization of a micromachined artificial hair cell vector hydrophone

Microsystem Technologies

Volumn 14, Issue 6, 2008, Pages 821-828

  Zhang, Binzhen ^a   Qiao, Hui ^a   Chen, Shang ^a   Liu, Jun ^b   Zhang, Wendong ^a   Xiong, Jijun ^a   Xue, Chenyang ^a   Zhang, Guojun ^a  

^a NORTH UNIVERSITY OF CHINA   (China)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MEMS; MICROMACHINING; MICROSTRUCTURE; PIEZOELECTRICITY;

ARTIFICIAL HAIR CELL VECTOR HYDROPHONE; FREQUENCY SENSITIVITY;

HYDROPHONES;

EID: 43049098477     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0560-0     Document Type: Article

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