Surface flatness of optical thin films evaluated by gray level co-occurrence matrix and entropy

Applied Surface Science

Volumn 254, Issue 15, 2008, Pages 4762-4767

  Tien, Chuen Lin ^a   Lyu, You Ru ^a   Jyu, Shiao Shan ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

Entropy; Gray level co occurrence matrix; Surface flatness; Thin film

Indexed keywords

ENTROPY; EVAPORATION; INTERFEROMETERS; OPTICAL COATINGS; OPTICAL FILMS; SURFACE PROPERTIES; TITANIUM OXIDES;

FIZEAU INTERFEROMETER; GRAY LEVEL CO-OCCURRENCE MATRIX; GUN EVAPORATION; SURFACE FLATNESS;

THIN FILMS;

EID: 42749093140     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.01.088     Document Type: Article

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