Determination of surface flatness by spectral interferometric method

Optics and Lasers in Engineering

Volumn 43, Issue 12, 2005, Pages 1315-1321

  Kandpal, H C ^a   Mehrotra, Ranjana ^a   Raman, Swati ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

Author keywords

Broad band source; Fizeau interferometer; Spectral interferometry; Surface flatness

Indexed keywords

COST EFFECTIVENESS; INTERFEROMETRY; LASER BEAMS; LIGHT INTERFERENCE; MONOCHROMATORS; PHASE SHIFT; SPECTRUM ANALYSIS;

BROAD-BAND SOURCE; FIZEAU-INTERFEROMETER; SPECTRAL INTERFEROMETRY; SURFACE FLATNESS;

SURFACE MEASUREMENT;

EID: 23144438475     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2005.02.002     Document Type: Article

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