Controlling the quality of nanocrystalline silicon made by hot-wire chemical vapor deposition by using a reverse H2 profiling technique

Journal of Non-Crystalline Solids

Volumn 354, Issue 19-25, 2008, Pages 2087-2091

  Li, H ^a   Franken, R H ^a   Stolk, R L ^a   van der Werf, C H M ^a   Rath, J K ^a   Schropp, R E I ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Chemical vapor deposition; Microcrystallinity; Nanocrystals; Photovoltaics; Silicon; Solar cells

Indexed keywords

CATALYST ACTIVITY; ENERGY CONVERSION; NANOCRYSTALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLAR CELLS; THIN FILMS;

CRYSTALLINE RATIO; PROFILING TECHNIQUE;

NANOCRYSTALLINE SILICON;

EID: 42649114128     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2007.10.046     Document Type: Article

References (17)

1. Meier J., Flückiger R., Keppner H., and Shah A. Appl. Phys. Lett. 65 (1994) 860
2. T. Repmann, B. Sehrbrock, C. Zahren, H. Siekmann, J. Müller, B. Rech, W. Psyk, R. Geyer, P. Lechner, in: Proceedings of 3rd World Conference on Photovoltaic Energy Conversion, Osaka, May 2003, 5O.A6.03.
3. M. Yoshimi, T. Sasaki, T. Sawada, T. Suezaki, T. Meguro, T. Matsuda, K. Santo, K. Wadano, M. Ichikawa, A. Nakajima, K. Yamamoto, in: Proceedings of 3rd World Conference on Photovoltaic Energy Conversion, Osaka, May 2003, 5O.A6.01.
4. Schropp R.E.I. Thin Solid Film 451&452 (2004) 455
5. H. Li, Single and multijunction silicon based thin film solar cells on flexible substrates with absorber layers made by hot-wire CVD, PhD thesis, Utrecht University, 2007.
6. M. van Veen, Tandem solar cells deposited using hot-wire chemical vapor deposition, PhD thesis, Utrecht University, The Netherlands, 2003.
7. Collins R.W., and Ferlauto A.S. Curr. Opin. Sol. Stat. & Mat. Sci. 6 (2002) 425
8. Gallagher A. Thin Solid Film 395 (2001) 25
9. Nozaki Y., Kitazoe M., Horii K., Umemoto H., Masuda A., and Matsumura H. Thin Solid Film 395 (2001) 47
10. Doyle R., Robertson R., Lin G., He M., and Gallagher A. J. Appl. Phys. 64 (1988) 3215
11. Duan H.L., Zaharias G.A., and Bent S.F. Mat. Res. Soc. Symp. Proc. 715 (2002) A15.5.7
12. J.K. Holt, Hot-wire chemical vapor deposition of silicon and silicon nitride for photovoltaics: experiments, simulations, and applications, PhD thesis, California Institute of Technology, 2003.
13. Duan H.L., Zaharias G.A., and Bent S.F. Thin Solid Film 395 (2001) 36
14. Grunsky D., Kupich M., Hofferberth B., and Schroeder B. Thin Solid Film 501 (2006) 332
15. Yan B., Yue G., Yang J., Guha S., Williamson D.L., Han D., and Jiang C. Appl. Phys. Lett. 85 (2004) 1955
16. Gordijn A., Rath J.K., and Schropp R.E.I. Prog. Photovoltaics: Res. Appl. 14 4 (2006) 305
17. Li H., Franken R.H., Stolk R.L., van der Werf C.H.M., Rath J.K., and Schropp R.E.I. Thin Solid Film 516 (2008) 755