A method to fabricate nanorod films on aluminum lattice membrane by magnetron sputtering

Thin Solid Films

Volumn 516, Issue 15, 2008, Pages 4983-4987

  Zheng, Huajun ^a   Zhong, Jinhuan ^a   Wang, Wei ^a   Zheng, Yifan ^a   Ma, Chunan ^a  

^a ZHEJIANG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Aluminum lattice membrane; Anodic aluminum oxide; Magnetron sputtering; Nanostructures; Thin films

Indexed keywords

ALUMINUM COMPOUNDS; CRYSTAL LATTICES; ETCHING; MAGNETRON SPUTTERING; NANORODS; NANOSTRUCTURED MATERIALS;

ALUMINUM LATTICE MEMBRANES; ANODIC ALUMINUM OXIDES; CHEMICAL ETCHING; PROTUBERANT NANODOTS;

THIN FILMS;

EID: 42649111339     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.005     Document Type: Article

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