Thickness effects on structures and electrical properties of lead zirconate titanate thick films

Ceramics International

Volumn 34, Issue 4, 2008, Pages 991-995

  Lin, Peng ^a   Ren, Wei ^a   Wu, Xiaoqing ^a   Shi, Peng ^a   Chen, Xiaofeng ^a   Yao, Xi ^a  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

Author keywords

C. Electrical properties; D. PZT films; MEMS; MOD process

Indexed keywords

GRAIN SIZE AND SHAPE; MEMS; POLYVINYL ACETATES; REMANENCE; STRUCTURAL RELAXATION; SURFACE ROUGHNESS; THICK FILMS;

COERCIVE FIELDS; CRACKING FORMATION; LEAD ZIRCONATE TITANATE THICK FILMS;

LEAD COMPOUNDS;

EID: 42649103318     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2007.09.052     Document Type: Article

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