Effect of deposition pressure on the properties of DLC coatings deposited by bipolar-type PBII&D

Surface and Interface Analysis

Volumn 40, Issue 3-4, 2008, Pages 806-809

  Choi, Junho ^a   Nakao, Setsuo ^b   Ikeyama, Masami ^b   Kato, Takahisa ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Deposition pressure; Deposition rate; DLC coating

Indexed keywords

DEPOSITION; ION IMPLANTATION; SUBSTRATES; SURFACE ROUGHNESS;

DEPOSITION PRESSURE; DEPOSITION RATE;

DIAMOND LIKE CARBON FILMS;

EID: 42449089937     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2707     Document Type: Conference Paper

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