CD performance of a new high-resolution laser pattern generator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3873, Issue pt 1, 1999, Pages 28-35

  Liden, Per ^a   Vikholm, Tomas ^a   Kjellberg, Lars ^a   Bjuggren, Mans ^a   Edgren, Klas ^a   Larsson, Johan ^a   Haddleton, Steven ^a   Askebjer, Per ^a  

^a Micronic Laser Systems AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BRAGG CELLS; DIFFRACTION; LASER BEAMS; LITHOGRAPHY;

ACOUSTOOPTIC DEFLECTION; CRITICAL DIMENSION UNIFORMITY; LASER PATTERN GENERATOR; PHOTOMASKS;

MASKS;

EID: 0033348346     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.373335     Document Type: Conference Paper

References (1)