Electrostatic correction of the chromatic and of the spherical aberration of charged-particle lenses (Part I)

Journal of Electron Microscopy

Volumn 50, Issue 5, 2001, Pages 383-390

  Weißbäcker, Christoph ^a   Rose, Harald ^a  

^a Inst of Applied Physics   (Germany)

Author keywords

Aberration correction; Chromatic aberration; Electrostatic corrector; Ion probe; Low voltage scanning electron microscope; Spherical aberration

Indexed keywords

ARTICLE;

ABERRATIONS; CHARGED PARTICLES; ELECTRIC FIELDS; ELECTRIC POWER SYSTEMS; SPHERES; STABILITY CRITERIA;

ABERRATION CORRECTION; CHROMATIC ABERRATION; ELECTROSTATIC CORRECTION; ELECTROSTATIC CORRECTOR; ION PROBE; LOW VOLTAGES; LOW-VOLTAGE SCANNING ELECTRON MICROSCOPE; OPTICAL ANALOGUES; SCANNING ELECTRONS; SPHERICAL ABERRATIONS;

SCANNING ELECTRON MICROSCOPY;

EID: 4243572941     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/50.5.383     Document Type: Article

References (13)

1. Über einige Fehler von Elektronenlinsen
2. Sphärische und chromatische Korrektur von Elektronen-Linsen
3. A possible chromatic correction system for electron lenses
4. Elektrostatische Korrektur des Farbfehlers von Teilchenlinsen
5. An electrostatic achromat
6. Electrostatic correction of the chromatic and of the spherical aberration of charged-particle lenses
7. Design of a high-resolution low-voltage scanning electron microscope
8. Aberration correction in a low-voltage SEM by a multipole corrector
9. Design of a monochromator for electron sources
10. Electrostatic correction of the chromatic and of the spherical aberration of charged-particle lenses (Part II)