Etching of the Si(001) surface with molecular oxygen

Physical Review Letters

Volumn 81, Issue 21, 1998, Pages 4676-4679

  Hannon, J B ^a   Bartelt, M C ^b   Bartelt, N C ^b   Kellogg, G L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4243287008     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.81.4676     Document Type: Article

References (15)

1. R. J. Madix, R. Parks, A. A. Susu, and J. A. Schwarz, Surf. Sci. 24, 288 (1971).
2. H. Kahata and K. Yagi, Surf. Sci. 220, 131 (1989).
3. K. Wurm, R. Kliese, Y. Hong, B. Röttger, Y. Wei, H. Neddermeyer, and I. S. T. Tsong, Phys. Rev. B 50, 1567 (1994).
4. K. Ohkubo, Y. Igari, S. Tomoda, and I. Kusunoki, Surf. Sci. 260, 44 (1992).
5. T. Engel, Surf. Sci. Rep. 18, 91 (1993).
6. M. L. Yu and B. N. Eldridge, Phys. Rev. Lett. 58, 1691 (1987).
7. J. R. Engstrom and T. Engel, Phys. Rev. B 41, 1038 (1990).
8. M. P. D'Evelyn, M. M. Nelson, and T. Engel, Surf. Sci. 186, 75 (1987).
9. U. Memmert and M. L. Yu, Surf. Sci. Lett. 245, L185 (1991).
10. E. Bauer, Rep. Prog. Phys. 57, 895 (1994).
11. S. Tanaka, et al., Appl. Phys. Lett. 69, 1235 (1996).
12. J. B. Hannon, M. C. Bartelt, N. C. Bartelt, and G. L. Kellogg, Surf. Rev. Lett. (to be published).
13. M. C. Bartelt and J. W. Evans, Phys. Rev. B 54, R17 359 (1996).
14. J. B. Hannon, et al., (unpublished).
15. J. R. Patel, in Proceedings of the Third International Symposium on Silicon Materials Science and Technology: Semiconductor Silicon 1977, H. R. Huff and E. Sirtl (Electrochemical Society, Pennington, NJ, 1977), p. 521.