Evaluation of excimer laser ablation of thin Cr film on glass substrate by analysing acoustic emission

Optics and Lasers in Engineering

Volumn 42, Issue 6, 2004, Pages 639-651

  Liu, Guangyu ^a   Toncich, Dario J ^b   Harvey, Erol C ^b  

^a UNIVERSITY OF MELBOURNE   (Australia)

^b SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Ablation; Acoustic emission; Excimer laser; Signal processing; Thin chromium film

Indexed keywords

ACOUSTIC EMISSIONS; CATHODE RAY OSCILLOSCOPES; CHROMIUM; EXCIMER LASERS; GLASS CERAMICS; LASER ABLATION; MORPHOLOGY; OPTICAL MICROSCOPY; SIGNAL PROCESSING; SIGNAL THEORY; THIN FILMS; TRANSDUCERS;

FILM EXFOLIATION; GLASS SUBSTRATES; SIGNAL ANALYSIS TOOLS; THIN CHROMIUM FILMS;

METALLIC FILMS;

EID: 4243183438     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2004.05.007     Document Type: Article

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