Audible acoustic wave emission in excimer laser interaction with materials

Journal of Applied Physics

Volumn 79, Issue 5, 1996, Pages 2186-2191

  Lu, Y F ^a   Hong, M H ^a   Chua, S J ^a   Teo, B S ^a   Low, T S ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CONTAMINATION; EXCIMER LASERS; FAST FOURIER TRANSFORMS; FREQUENCIES; LASER ABLATION; LASER BEAM EFFECTS; MATHEMATICAL MODELS; SUBSTRATES; SURFACE CLEANING;

ACOUSTIC WAVE AMPLITUDE; ACOUSTIC WAVE ENERGY; LASER FLUENCE; LASER MATERIALS INTERACTIONS;

ACOUSTIC EMISSIONS;

EID: 0030105338     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361182     Document Type: Article

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