Surface analysis, depth profiling, and evaluation of Si cleaning procedures by postionization sputtered neutral mass spectrometry

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 301-304

  Emerson, A B ^a   Ma, Y ^a   Wise, M L ^a   Green, M L ^a   Downey, S W ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4243141933     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588465     Document Type: Article

References (10)

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