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Volumn 37, Issue 5, 2008, Pages 764-769

Annealing studies on zinc oxide thin films deposited by magnetron sputtering

Author keywords

Annealing; Laser annealing; Metal semiconductor metal; Nitrogen annealing; Photodetector; RTA; Solar cell; Sputtering; ZnO

Indexed keywords

LASER ANNEALING; LASER POWER; NITROGEN ANNEALING;

MAGNETRON SPUTTERING; PHOTODETECTORS; RAPID THERMAL ANNEALING; SOLAR CELLS; ZINC OXIDE;

THIN FILMS;

EID: 42249109538 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-007-0357-4 Document Type: Conference Paper

Times cited : (30)

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