A reliable optical method for in-situ process control for deposition of Cu(In,Ga)Se2 thin layers for photovoltaics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6651, Issue , 2007, Pages

  Hesse, R ^a   Caballero, R ^a   Abou Ras, D ^a   Unold, T ^a   Kaufmann, C A ^a   Schock, H W ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Coevaporation; CuInGaSe2; In situ process control; Optical model

Indexed keywords

PROCESS CONTROL; THIN FILMS; X RAY DIFFRACTION;

COEVAPORATION; OPTICAL MODELS;

PHOTOVOLTAIC EFFECTS;

EID: 42149190848     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.733726     Document Type: Conference Paper

References (9)

1. C.A. Kaufmann, A. Neisser, R. Klenk, R. Scheer Thin Solid Films 480-481 (2005) 515-519.
2. I.L. Repins, N. Gomez, L. Simpson, B. Joshi. Mater. Res. Soc. Symp. Proc. Vol. 865 (2005) F15.3.1- F15.3.12.
3. R. Scheer, A. Neisser, K. Sakurai, P. Fons, S. Niki Appl. Phys. Lett. 82 (13) (2003) 2091-2093.
4. El-Shair, H.T., Bekheet, A.E.: J. Phys.D 25 (1992) 1122.
5. Kwang-Ho Park, Hyung-Gon Kim, Wha-Tek Kim, Chang-Dae Kim, Hae-Mun Jeong, Kie-Jin Lee and Byong-Hyuok Lee, Solid State Comm. 70 (1989) 971.
6. S. Ramo, I. R. Whinnery: "Fields and waves in modern radio",Springer 6th edition. New York 1973 7. Suzuki, H., Mori, R.: Jpn. J. Appl. Phys. 13 (1974) 417
7. Okamoto, H., in: "Phase Diagrams of Indium Alloys and Their Engineering Applications", C.E.T. White, H. Okamoto (eds.), Indium Corporation of America, Utica, N.Y., and Materials Information Soc., Materials Park, Ohio (1992)
8. Pfitzner A., Lutz H. D. J. Sol. Stat. Chem. (1996) 124 305-308
9. Ghemard G., Jaulmes S. Etienne J., Flahaut J. Act. Cryst. C. (1983) 39 968-971