Conductive atomic force microscope for investigation of thin-film gate insulators

Bulletin of the Polish Academy of Sciences: Technical Sciences

Volumn 56, Issue 1, 2008, Pages 39-44

  Wielgoszewski, G ^a   Gotszalk, T ^a   Woszczyna, M ^a   Zawierucha, P ^a   Zschech, E ^b  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b IBM MICROELECTRONICS   (United States)

Author keywords

AFM; Conductive probe; Thin film oxides

Indexed keywords

ATOMIC FORCE MICROSCOPY; GRAPHITE; OXIDES;

CONDUCTIVE PROBE; HIGHLY ORIENTED PYROLYTIC GRAPHITE (HOPG);

THIN FILMS;

EID: 42149190117     PISSN: 02397528     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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