Carbon thin film deposition by Thermionic Vacuum Arc (TVA)

Journal of Optoelectronics and Advanced Materials

Volumn 10, Issue 3, 2008, Pages 672-674

  Ekem, N ^a   Musa, G ^b   Pat, S ^a   Balbag, Z ^a   Cenik, I ^a   Vladoiu, R ^b  

^a ESKISEHIR OSMANGAZI UNIVERSITY   (Turkey)

^b OVIDIUS UNIVERSITY   (Romania)

Author keywords

AFM; Carbon thin film; Refractive index; TVA; XRD

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON FILMS; DEPOSITION; MORPHOLOGY; REFRACTIVE INDEX; SUBSTRATES; SURFACE MORPHOLOGY; THERMIONIC POWER GENERATION; VACUUM APPLICATIONS;

CARBON THIN FILMS; DEPOSITED FILMS; GLASS SUBSTRATES; THERMIONIC VACUUM ARC;

THIN FILMS;

EID: 41849110564     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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