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Volumn 1, Issue , 2006, Pages 932-935

Trap density imaging of silicon wafers using a lock-in infrared camera technique

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); ELECTRON TRAPS; PASSIVATION; POLYSILICON; SILICON WAFERS;

EID: 41749125200     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WCPEC.2006.279609     Document Type: Conference Paper
Times cited : (3)

References (15)
  • 13
    • 41749109140 scopus 로고    scopus 로고
    • P. Pohl et al, to be publisehd
    • P. Pohl et al., to be publisehd.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.