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Volumn 1, Issue , 2006, Pages 932-935
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Trap density imaging of silicon wafers using a lock-in infrared camera technique
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Author keywords
[No Author keywords available]
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Indexed keywords
DISLOCATIONS (CRYSTALS);
ELECTRON TRAPS;
PASSIVATION;
POLYSILICON;
SILICON WAFERS;
DISLOCATION DENSITY;
INFRARED CAMERAS;
SURFACE PASSIVATION LAYERS;
TRAP DENSITY;
THERMOGRAPHY (IMAGING);
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EID: 41749125200
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/WCPEC.2006.279609 Document Type: Conference Paper |
Times cited : (3)
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References (15)
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