One Megapixel SLM with high optical fill factor and low creep actuators

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Volumn , Issue , 2006, Pages 23-24

  Friedrichs, Martin ^a   Schmidt, Jan ^a   Duerr, Peter ^a   Bakke, Thor ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; OPTICAL FIBERS; PIXELS;

MECHANICAL CREEP; MEGAPIXELS;

ACTUATORS;

EID: 41549131812     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/omems.2006.1708246     Document Type: Conference Paper

References (3)

1. U. B. Ljungblad et al. "A high-end mask writer using a spatial light modulator", Proc. SPIE, vol. 5721
2. U. Dauderstädt et al. "Application of Spatial Light modulators for Microlithography" Proc. SPIE vol. 5348
3. U. Dauderstädt et al "Mechanical Stability of Spatial Light Modulators in Microlithography" Proc. of SPIE Vol. 5721