High-speed wavefront control using MEMS micromirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5895, Issue , 2005, Pages 1-9

  Bifano, T G ^a   Stewart, J B ^a  

^a Boston University   (United States)

Author keywords

Adaptive optics; Deformable mirrors; MEMS; Wavefront control

Indexed keywords

DEFORMABLE MIRRORS; MEMS MICROMIRRORS; SILICON DEVICES;

ACTUATORS; ALGORITHMS; DEFORMATION; ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; MIRRORS; SILICON;

WAVEFRONTS;

EID: 29344462446     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.619355     Document Type: Conference Paper

References (0)