A novel laser micro/nano-machining system for FPD process

Journal of Materials Processing Technology

Volumn 201, Issue 1-3, 2008, Pages 497-501

  Kim, Kihyun ^a   Choi, Young Man ^a   Gweon, Dea Gab ^a   Lee, Moon G ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Ajou University   (South Korea)

Author keywords

Dual stage; Laser machining; Linear motor; Voice coil motor

Indexed keywords

GLASS; LASER RADIATION; LINEAR MOTORS; MICROMACHINING;

LASER MACHINING; MOTHER GLASS; VOICE COIL MOTORS;

FLAT PANEL DISPLAYS;

EID: 41549090144     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.11.186     Document Type: Article

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