Numerical studies on PACVD processes used for TiN multifunctional films using metal organic precursors

Journal of Crystal Growth

Volumn 310, Issue 7-9, 2008, Pages 1697-1702

  Son, Seok Jae ^a   Yi, Kyung Woo ^a   Joo, Jung Hoon ^b   Mahrholz, J ^c   Rie, K T ^c  

^a Seoul National University   (South Korea)

^b Kunsan National University   (South Korea)

^c TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

A1. Computer simulation; A1. Surface processes; A2. Growth from vapor; A3. Metalorganic chemical vapor deposition; B1. Nitrides

Indexed keywords

CHLORINE; CRYSTAL GROWTH; NITRIDES; SUBSTRATES; THIN FILMS;

GROWTH FROM VAPOR; MASS SPECTRUM ANALYSIS;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 41449098324     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.11.163     Document Type: Article

References (15)

1. Wöhle J., Pfohl C., Rie K.-T., Gebauer-Teichmann A., and Kim S.K. Surf. Coat. Technol. 131 (2000) 127
2. Rie K.-T., Gebauer A., and Wöhle J. Surf. Coat. Technol. 74-75 (1995) 362
3. Rie K.-T., and Wöhle J. Surf. Coat. Technol. 112 (1999) 226
4. Kim S.K., Kim T.H., Wöhle J., and Rie K.-T. Surf. Coat. Technol. 131 (2000) 121
5. Girolami G.S., Jensen J.A., Gozum J.E., and Pollina D.M. Mater. Res. Soc. Symp. Proc. (Better Ceram. Chem. 3) 121 (1988) 429
6. Son S.-J., Yi K.-W., Mahrholz J., and Rie K.-T. Surf. Coat. Technol. 201 (2007) 7318
7. Alfred Grill. Cold Plasma in Materials Fabrication: From Fundamentals to Applications (1994), Wiley, New York
8. Gorur Govinda Raju. Gaseous Electronics: Theory and Practice (2006), CRC/Taylor & Francis, Boca Raton, FL
9. A. Gebauer, VDI-Fortschrittber 5 (1994) 344 (Doctoral Dissertation, Technische Universität Braunschweig).
10. Weber A., and Klages C.-P. J. Electrochem. Soc. 142 6 (1995) L79
11. Weber A., Nikulski R., Klages C.-P., Gross M.E., Charatan R.M., Opilan R.L., and Brown W.L. Appl. Surf. Sci. 91 (1995) 314
12. Weber A., Nikulski R., and Klages C.-P. Appl. Phys. Lett. 63 3 (1993) 325
13. Weber A., Nikulski R., and Klages C.-P. J. Electrochem. Soc. 141 3 (1994) 849
14. CFD-ACE, CFD Research Corporation, 215 Wynn Drive, Hunstville, AL 35805, USA 〈http://www.cfdrc.com〉.
15. Jang S.-S., and Lee W.-J. J. Vac. Sci. A 19 5 (2001) 2235