Numerical studies on up scaling of metal organic PACVD processes used for tribological coating in automotive industry

Surface and Coatings Technology

Volumn 201, Issue 16-17, 2007, Pages 7318-7326

  Son, Seok Jae ^a   Yi, Kyung Woo ^a   Mahrholz, J ^b   Rie, K T ^b  

^a Seoul National University   (South Korea)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Numerical simulation; PACVD process; Plasma analysis; TiN

Indexed keywords

AUTOMOTIVE INDUSTRY; COMPUTER SIMULATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SUBSTRATES; TITANIUM NITRIDE;

PLASMA ANALYSIS; PROCESS GAS COMPOSITION; TRIBOLOGICAL COATING; UP-SCALED INDUSTRIAL CHAMBER;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

AUTOMOTIVE INDUSTRY; COMPUTER SIMULATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; TITANIUM NITRIDE;

EID: 34047263040     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.01.049     Document Type: Article

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