Vacuum pumping study of Titanium-Zirconium-Vanadium thin films

Proceedings of the IEEE Particle Accelerator Conference

Volumn 1, Issue , 2003, Pages 620-622

  Li, Yulin ^a   Ho, Simon ^a  

^a Newman Laboratory for Elementary Particle Physics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON MONOXIDE; ELECTRON EMISSION; HYDROGEN; MAGNETRON SPUTTERING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STAINLESS STEEL; TITANIUM; VACUUM PUMPS;

ENERGY RECOVERY LEVEL (ERL); MOLECULAR PUMPS; SPUTTERING CHAMBERS; SPUTTERING CURRENTS;

THIN FILMS;

EID: 4143134478     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. http://erl.chess.cornell.edu/papers/WhitePaper_v41.pdf
2. C.Benvenuti, et al., Vacuum 60 (2001) p.57-65
3. B.Henrist, et al, CERN Vac Tech. Notes 98-08, 98-20, and 00-32
4. R.Kersevan, Proc. EPAC 2002, Paris, France, p.2565
5. nd Ed. North-Holland, 2001 p.229