Optimization of field-emission columns for next-generation MEBES® systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2754-2759

  Pearce Percy, H ^a   Abboud, F ^a   Garcia, R ^a   Mankos, M ^a  

^a Etec Systems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4143069276     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589721     Document Type: Article

References (11)

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5. M. Gesley, J. Vac. Sci. Technol. B 9, 2949 (1991).
6. A. D. Brodie and W. D. Meisburger, Microelectron. Eng. 17, 399 (1992).
7. P. W. Hawkes and E. Kasper, Principles of Electron Optics (Academic, New York, 1989), Vol. 2, Chap. 47.
8. L. Veneklasen, Physical Aspects of Electron Microscopy, edited by B. Siegel and D. R. Beaman (Wiley, New York, 1975), pp. 315-329.
9. J. Orloff, Optik (Stuttgrat) 63, 369 (1983).
10. G. H. Jansen, Advances in Electronics & Electron Physics, Suppl. 21, edited by P. W. Hawkes (Academic, London, 1990).
11. M. Gesley, US Patent No. 5, 196, 707 (23 March 1993).