Multiparadigm modeling for hybrid dynamic systems using a Petri net framework

IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans

Volumn 38, Issue 2, 2008, Pages 493-498

  Lee, Jin Shyan ^a   Zhou, MengChu ^b,c   Hsu, Pau Lo ^d  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^c XIDIAN UNIVERSITY   (China)

^d NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Automated manufacturing systems; Hybrid dynamic systems (HDSs); Multiparadigm modeling (MPaM); Petri nets (PNs); Semiconductor manufacturing

Indexed keywords

HIERARCHICAL SYSTEMS; PETRI NETS; RAPID THERMAL PROCESSING; SEMICONDUCTOR DEVICE MANUFACTURE;

HYBRID DYNAMIC SYSTEM; MULTIPARADIGM MODELING; SEMICONDUCTOR MANUFACTURING;

DYNAMICAL SYSTEMS;

EID: 41149102377     PISSN: 10834427     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSMCA.2007.914747     Document Type: Article

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