Servo scanning 3D micro-EDM based on macro/micro-dual-feed spindle

International Journal of Machine Tools and Manufacture

Volumn 48, Issue 7-8, 2008, Pages 858-869

  Tong, Hao ^a   Li, Yong ^b   Wang, Yang ^a   Yu, Dingwen ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

3D micro structure; Linear motor; Macro micro dual feed spindle; Micro EDM; PZT actuator; Servo scanning machining

Indexed keywords

FABRICATION; LINEAR MOTORS; MICROSTRUCTURE; PIEZOELECTRIC ACTUATORS; SERVOMECHANISMS;

MICROELECTRICAL DISCHARGE MACHINING (EDM); RELATIVE SCANNING MOTION; SERVO SCANNING MACHINING; SPINDLES;

ELECTRIC DISCHARGE MACHINING;

EID: 40849134217     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2007.11.008     Document Type: Article

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