Stability of lithium phosphorous oxynitride thin films in humid air

Acta Physico - Chimica Sinica

Volumn 22, Issue 11, 2006, Pages 1413-1418

  Liu, Wen Yuan ^a,b   Li, Chi Lin ^a   Fu, Zheng Wen ^a  

^a FUDAN UNIVERSITY   (China)

^b NORTHWEST INSTITUTE OF NUCLEAR TECHNOLOGY   (China)

Author keywords

All solid state thin film lithium battery; LiPON thin films; Magnetron sputtering; Thin film electrolyte

Indexed keywords

EID: 40749087856     PISSN: 18721508     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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