Phononic crystals based on LiNbO3 realized using domain inversion by electron-beam irradiation

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 55, Issue 2, 2008, Pages 273-278

  Assouar, Badreddine M ^a   Vincent, Brice ^a   Moubchir, Hanane ^b  

^a INSTITUT JEAN LAMOUR   (France)

^b FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ELECTRON BEAMS; IRRADIATION; SCANNING ELECTRON MICROSCOPY; WET ETCHING;

ELECTRON BEAM IRRADIATION; PHONONIC CRYSTALS;

PHOTONIC CRYSTALS;

EID: 40549135358     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2008.645     Document Type: Article

References (18)

1. A. Khelif, P. A. Deymier, B. Djafari-Rouhani, J. O. Vasseur, and L. Dobrzynski, "Two-dimensional phononic crystal with tunable narrow pass band: Application to a waveguide with selective frequency," J. Appl. Phys., vol. 94, no. 3, pp. 1308-1311, 2003.
2. V. Laude, M. Wilm, S. Benchabane, and A. Khelif, "Full band gap for surface acoustic waves in a piezoelectric phononic crystal," Phys. Rev. E, vol. 71, art. no. 036607, 2005.
3. S. Benchabane, A. Khelif, J.-Y. Rauch, L. Robert, and V. Laude, "Evidence for complete surface wave band gap in a piezoelectric phononic crystal," Phys. Rev. E, vol. 71, art. no. 065601, 2006.
4. T.-T. Wu, L.-C. Wu, and Z.-G. Huang, "Frequency band-gap measurement of two-dimensional air/silicon phononic crystals using layered slanted finger interdigital transducers," J. Appl. Phys., vol. 97, art. no. 094916, 2005.
5. 3, by direct electron beam lithography at room temperature," Electron. Lett., vol. 27, pp. 828-829, 1991.
6. V. Y. Shur, E. L. Rumyanstev, E. V. Nikolaeva, E. I. Shihishkin, R. G. Batchko, M. M. Fejer, R. L. Byer, and I. Mnushkina, "Domain kinetics in congruent and stoichiometric lithium niobate," Ferroelectrics, vol. 269, pp. 189-194, 2002.
7. V. Shur, E. Rumyanstev, R. Batchko, G. Miller, M. Fejer, and R. Byer, "Physical basis of the domain engineering in the bulk ferroelectrics," Ferroelectrics, vol. 221, pp. 157-167, 1999.
8. 3," J. Opt. Soc. Am. B, vol. 12, pp. 2102-2107, 1995.
9. G. Rosenman, K. Garb, A. Skliar, M. Oron, D. Eger, and M. Katz, "Domain broadening in quasi-phase-matched nonlinear optical devices," Appl. Phys. Lett., vol. 73, pp. 865-867, 1998.
10. 4 waveguides," Appl. Phys. Lett., vol. 57, pp. 2074-2076, 1992.
11. 3 waveguides for second harmonic generation," J. Appl. Phys., vol. 70, pp. 1947-1951, 1991.
12. M. Naiben, Z. Youngyuan, and F. Duan, "Ferroelectric crystals with periodic laminar domains as the micron superlattices for optic acoustic processes," Ferroelectrics, vol. 106, pp. 99-104, 1990.
13. V. Bermudez, D. Callejo, S. Vilaplana, J. Capmany, and E. Dieguez, "Engineering of lithium niobate domain structure through the off-centered Czochralski growth technique," J. Crystal Growth, vol. 237-239, pp. 677-681, 2002.
14. C. Restoin, S. Massy, C. Darraud-Taupiac, and A. Barthelemy, "Fabrication of 1D and 2D structures at submicrometer scale on lithium niobate by electron beam bombardment," Optical Materials, vol. 22, pp. 193-199, 2003.
15. 3 by direct electron beam lithography," J. Appl. Phys., vol. 93, pp. 9943-9946, 2003.
16. 3," Materials Science in Semiconductor Processing, vol. 3, pp. 405-407, 2000.
17. 3 by high-resolution topography," J. Appl. Crystallogr., vol. 29, pp. 279-284, 1996.
18. 3 using electron beam irradiation for phononic crystals," in Proc. IEEE Int. Symp. Application of Ferroelectrics, 2006, to be published.