Bulk strains in Si induced by thickness mode ultrasonic waves and analysed with x-ray Bragg diffraction

Journal of Physics D: Applied Physics

Volumn 41, Issue 6, 2008, Pages

  Honnicke M G ^a   Cusatis, C ^a   De Camargo, P C ^a  

^a FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; SILICON; X RAY DIFFRACTION ANALYSIS;

BULK STRAINS; ULTRASONIC THICKNESS MODE; X-RAY STROBOSCOPIC MEASUREMENTS;

ULTRASONIC WAVES;

EID: 40549120326     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/6/065401     Document Type: Article

References (40)

1. Zolotoyabko E, Sander B, Komem Y and Kantor B 1993 Appl. Phys. Lett. 63 1540
2. Lomonosov A and Hess P 1999 Phys. Rev. Lett. 83 3876
3. d'Almeida T and Gupta Y M 2000 Phys. Rev. Lett. 85 330
4. Loveridge-Smith A et al 2001 Phys. Rev. Lett. 86 2349
5. d'Almeida T, Di Michiel M, Kaiser M, Buslaps T and Fanget A 2002 J. Appl. Phys. 92 1715
6. Shilo D and Zolotoyabko E 2003 Phys. Rev. Lett. 91 115506
7. Roshchupkin D V, Roshchupkina H D and Irzhak D V 2005 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52 2081
8. Hauer A and Burns S J 1975 Appl. Phys. Lett. 27 524
9. Polikarpov I, de Oliveira R T and Cusatis C 1998 Rev. Sci. Instrum. 69 2218
10. DeCamp M F et al 2001 Nature 413 825
11. Navasardyan M A 2001 J. Appl. Cryst. 34 763
12. Grigoriev A, Do D-H, Kim D M, Eom C-B, Evans P G, Adams B and Dufresne E M 2007 Appl. Phys. Lett. 89 021109
13. Hock R, Vogt T, Kulda J, Mursic Z, Fuess H and Magerl A 1993 Z. Phys. B 90 143
14. Liss K-D, Magerl A, Remhof A and Hock R 1997 Acta Cryst. A 53 181
15. Roshchupkin D V, Tucoulou R and Brunel M 1999 Appl. Phys. Lett. 75 639
16. Johnson Q, Mitchell A, Keeler R N and Evans L 1970 Phys. Rev. Lett. 25 1099
17. Richardson B A and Kino G S 1970 Appl. Phys. Lett. 16 82
18. Whatmore R W, Goddard P A, Tanner B K and Clarck G F 1982 Nature 299 44
19. Tucoulu R, Mathon O, Ferrero C, Mocella V, Roshchupkin D V and Kumon R E 2005 J. Appl. Phys. 97 113505
20. Fox G W and Carr P H 1931 Phys. Rev. 37 1622
21. Haruta K 1967 J. Appl. Phys. 38 3312
22. Saccocio E J, Lopez M A and Lazzara K J 1967 J. Appl Phys. 38 309
23. Zarka A, Capelle B, Detaint J and Schwartzel J 1988 J. Appl. Cryst. 21 967
24. de Souza P E N, Cusatis C, Saul C K, Rodrigues A R D and de Camargo P C 2003 J. Appl. Cryst. 36 1144
25. LeRoux S D, Colella R and Bray R 1975 Phys. Rev. Lett. 35 230
26. Matsouli I, Pernot E, Baruchel J, Kvardakov V, Chabert L and Palmer S B 1999 J. Phys. D: Appl. Phys. 32 A104
27. Polikarpov I V, Panov V and Bartunik H D 1994 J. Appl. Cryst. 27 453
28. Authier A 2001 Dynamical Theory of X-ray Diffraction (Oxford: University Press) p 148
29. Hönnicke M G and Cusatis C 2005 J. Phys. D: Appl. Phys. 38 A73
30. Pinsker Z G 1978 Dynamical Scattering of X-rays in Crystals (Berlin: Spinger) p 213
31. Caticha A and Caticha-Ellis S 1982 Phys. Rev. B 25 971
32. Verbeni R et al 1996 J. Synchrotron Rad. 3 62
33. Wille H-C, Shvyd'ko Yu V, Gerdau E, Lerche M, Lucht M, Rüter H D and Zegenhagen J 2002 Phys. Rev. Lett. 89 285901
34. Hart M 1980 Characterization of Crystal Growth Defects by X-ray Methods (NATO Advanced Study Institutes Series, Series B: Physics) ed B K Tanner and D K Bowen (New York: Plenum) p 484
35. Dumond J W M 1937 Phys. Rev. 52 872
36. Epelboin Y and Capelle B 2002 Cryst. Res. Technol. 37 676
37. Zolotoyabko E and Sander B 1995 Acta Cryst. A 51 163
38. Zolotoyabko E, Sander B, Komem Y and Kantor B 1994 Acta Cryst. A 50 253
39. Sander B, Zolotoyabko E and Komem Y 1995 J. Phys. D: Appl. Phys. 28 A287
40. Tanner B K 1976 X-ray Diffraction Topography. (Oxford: Pergamon)