Investigation of surface acoustic wave fields in silicon crystals by x-ray diffraction: A dynamical theory approach

Journal of Applied Physics

Volumn 97, Issue 11, 2005, Pages

  Tucoulou, R ^a   Mathon, O ^a   Ferrero, C ^a   Mocella, V ^b   Roshchupkin, D V ^c   Kumon, R E ^d  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b CNR   (Italy)

^c INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^d UNIVERSITY OF WINDSOR   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODELS; SILICON CRYSTALS; SURFACE ACOUSTIC WAVES; X-RAY ENERGIES;

ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVES; APPROXIMATION THEORY; COMPUTER SIMULATION; DEFORMATION; X RAY DIFFRACTION;

SILICON;

EID: 20544441734     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1905778     Document Type: Article

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