Improvement of short defect density by controlling surface height of Cu line

Advanced Metallization Conference (AMC)

Volumn , Issue , 2003, Pages 121-125

  Seo, S ^a   Kawano, H ^b   Satake, M ^a   Hattori, T ^a   Harada, T ^a   Itoh, Y ^a   Ueda, T ^a  

^a PANASONIC CORPORATION   (Japan)

^b Engineering Department   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BRIDGES; DEFECTS; EROSION; INTEGRATED CIRCUITS; OXIDES; PARAMETER ESTIMATION;

CONVEX SHAPE; LAYOUT PATTERNS; LINE PATTERN; OXIDE SEPARATION;

COPPER;

EID: 4043103533     PISSN: 15401766     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. Julie Segal, Susan Parker, Sergei Bakarian, James Pak, "Critical Area Based Yield Modeling on an Advanced Microprocessor Design" in Proceedings of ISSM 2000, pp. 191