New improvement results on 7.5 kV 4H-SiC p-IGBTs with Rdiff, on of 26 mω-cm2 at 25°C

Proceedings of the International Symposium on Power Semiconductor Devices and ICs

Volumn , Issue , 2007, Pages 281-284

  Zhang, Qingchun ^a   Jonas, Charlotte ^a   Callanan, Robert ^a   Sumakeris, Joe ^a   Das, Mrinal ^a   Agarwal, Anant ^a   Palmour, John ^a   Ryu, Sei Hyung ^b   Wang, Jun ^c   Huang, Alex ^c  

^a Arkansas Power Electronics International Inc   (United States)

^b WAYNE STATE UNIVERSITY   (United States)

^c NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT CONTROL; ELECTRIC RESISTANCE MEASUREMENT; ELECTROOXIDATION; GATE DIELECTRICS; JUNCTION GATE FIELD EFFECT TRANSISTORS; THRESHOLD VOLTAGE;

CONDUCTIVITY MODULATION; CURRENT SUPPRESSING LAYER (CSL); GATE OXIDATION; REVERSE BIAS SAFE OPERATING AREA (RBSOA);

INSULATED GATE BIPOLAR TRANSISTORS (IGBT);

EID: 39749165093     PISSN: 10636854     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISPSD.2007.4294987     Document Type: Conference Paper

References (4)

1. J. B. Casady and R. W. Johnson, "Status of silicon carbide (SiC) as a wide-bandgap semiconductor for high-temperature application: A review," Solid-State Electron., vol. 39, pp. 1409-1422, 1996.
2. Q. Zhang, H-R. Chang, M. Gomez, C. Bui, E. Hanna, J. A. Higgins, T. Isaacs-Smith and J. R. Williams: "10kV Trench Gate IGBTs on 4H-SiC," Proceedings of the 18th International Symposium on Power Semiconductor Devices & ICs, May 2326, 2005, p303-306.
3. Q. Zhang, C. Jonas, S. Ryu, A. Agarwal, J. Palmour; "Design and fabrications of high voltage IGBTs on 4H-SiC", Proceedings of the 18th International Symposium on Power Semiconductor Devices & ICs, pp285-288, September 2006.
4. Q. Zhang; C. Jonas, B. Heath, M. Das, S. Ryu, A. Agarwal, J. Palmour, "9 kV 4H-SiC IGBTs with 88 mω.cm2 of R diff, on", 6th European Conference on Silicon Carbide and Related Materials, EC̀SC̀RM 2006, Newcastle upon Tyne, UK, September 3rd - 7th, 2006