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Volumn 105, Issue 6, 2004, Pages 667-673

Monocrystalline and polycrystalline ZnO and ZnMnO films grown by atomic layer epitaxy - Growth and characterization

(9) Wojcik A a Kopalko, K b Godlewski, M a,b Lusakowska E b Paszkowicz, W b Dybko, K b Domagala J b Szczerbakow, A b Kaminska E c

a CARDINAL STEFAN WYSZY SKI UNIVERSITY (Poland)

b INSTITUTE OF PHYSICS (Poland)

c ukasiewicz Research Network Institute of Microelectronics and Photonics (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; EPITAXIAL GROWTH; LAYERED MANUFACTURING; OPTOELECTRONIC DEVICES; POLYCRYSTALLINE MATERIALS; POSITIVE IONS; PYROLYSIS; SEMICONDUCTING FILMS; SEMICONDUCTOR DOPING; SUBSTRATES; X RAY ANALYSIS; ZINC OXIDE;

ATOMIC LAYER EPITAXY; PIEZOELECTRIC SENSORS; ZNMNO FILMS; ZNO FILMS;

SEMICONDUCTING ZINC COMPOUNDS;

EID: 3943097985 PISSN: 05874246 EISSN: None Source Type: Journal
DOI: 10.12693/APhysPolA.105.667 Document Type: Conference Paper

Times cited : (7)

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