Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films

Optics and Laser Technology

Volumn 40, Issue 5, 2008, Pages 677-681

  Guo, Y J ^a,b   Zu, X T ^a   Jiang, X D ^b   Yuan, X D ^b   Xu, S Z ^a,b   Wang, B Y ^a,b   Tian, D B ^a,b  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

Laser induced damage threshold; Porous ratio; Weak absorption

Indexed keywords

ATOMIC FORCE MICROSCOPY; GELS; LASER DAMAGE; MICROSTRUCTURE; MONOLAYERS; MORPHOLOGY; PHYSICAL VAPOR DEPOSITION; SOLS; SPIN COATING; ZIRCONIA;

ELECTRON BEAM EVAPORATION; LASER-INDUCED DAMAGE THRESHOLD; POROUS RATIO; WEAK ABSORPTION;

LIQUID FILMS;

EID: 39149119958     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2007.11.001     Document Type: Article

References (12)

1. Sianty W.G., Neterfield R.P., and Martin P.J. Protective dielectric coatings produced by ion-assisted deposition. Appl Opt 23 (1984) 1116-1119
2. Krishna M.G., Rao K.N., and Mohan S. Optical properties of ion-assisted deposited zirconia thin films. J Vac Sci Technol A 10 (1992) 3451-3455
3. Ghanasham Krishna M., Narasimha Rao K., and Mohan S. A comparative study of the optical properties of zirconia thin films prepared by ion-assisted deposition. Thin Solid Films 207 (1992) 248-251
4. 2 films by chemical vapor deposition. Thin Solid Films 254 (1995) 33-38
5. 2 thin films prepared by ion-assisted deposition. Appl Opt 35 (1996) 5545-5552
6. Moulzolf S.C., and Lad R.J. Diffraction studies of cubic phase stability in undoped zirconia thin films. J Mater Res 15 (2000) 369-376
7. Ciosek J., Paszkowicz W., Pankowski P., Firak J., Stanislawek U., and Patron Z. Modification of zirconium oxide film microstructure during post-deposition annealing. Vacuum 72 (2003) 135-141
8. 2 coatings' dependence on annealing temperature. Appl Surf Sci 239 (2005) 201-208
9. Zhang D.P., Zhang D.W., Fan S.H., Huang J.B., Zhao Y.A., and Shao J.D. Using ion post-treatment technique to improve laser-induced damage threshold of thin films. High Power Laser Part Beams 17 (2005) 213-216 [in Chinese]
10. 2 thin films. Acta Phys Sin 55 (2006) 1201-1206 [in Chinese]
11. Zu XT, Chen XQ, Zheng WG, Jiang XD, Yuan XD, Li XP. Comparative studies of laser-induced damage of several monolayer optical films. In: The 14th international conference on radiation effects in insulators [to be published].
12. Yoshida K., Yabe T., Yoshida H., and Yamanaka C. Mechanism of damage formation in antireflection coatings. J Appl Phys 60 (1986) 1545-1546