In situ electrochemical control of electroactive polymer films on a CMOS chip

Sensors and Actuators, B: Chemical

Volumn 129, Issue 2, 2008, Pages 699-704

  Prakash, Somashekar Bangalore ^a   Urdaneta, Mario ^a   Christophersen, Marc ^a   Smela, Elisabeth ^a   Abshire, Pamela ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

CMOS MEMS integration; Electroactive polymers; Electrochemical actuation; Electrodeposition; In situ control; Potentiostat; PPy(DBS)

Indexed keywords

CMOS INTEGRATED CIRCUITS; CYCLIC VOLTAMMETRY; ELECTRODEPOSITION; MICROSYSTEMS;

CMOS-MEMS INTEGRATION; ELECTROACTIVE POLYMERS; ELECTROCHEMICAL ACTUATION; ELECTROCHEMICAL CONTROL; ELECTROCHEMICAL MICROACTUATORS; POTENTIOSTAT;

POLYMER FILMS;

EID: 38949128032     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.09.029     Document Type: Article

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