Electronic scheme for multiplexed dynamic behavior excitation and detection of piezoelectric silicon-based micromembranes

IEEE Sensors Journal

Volumn 8, Issue 3, 2008, Pages 210-217

  Ayela, Cédric ^a   Alava, Thomas ^a   Lagrange, Denis ^a   Rèmiens, Denis ^b   Soyer, Caroline ^b   Ondarçuhu, Thierry ^a   Greve, Anders ^c   Nicu, Liviu ^a  

^a UNIVERSITÉ PAUL SABATIER   (France)

^b INSTITUT D ELECTRONIQUE   (France)

^c TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Mass sensitivity; Microelectromechanical systems (MEMS); Multiplexed detection; Piezoelectric

Indexed keywords

FIELD PROGRAMMABLE GATE ARRAYS (FPGA); MEMS; MULTIPLEXING; SENSITIVITY ANALYSIS; SILICON;

MASS SENSITIVITY; MULTIPLEXED DETECTION; PARALLEL EXCITATION; PIEZOELECTRIC SILICON;

PIEZOELECTRIC MATERIALS;

EID: 38749148503     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2007.913021     Document Type: Article

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