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Volumn 131-133, Issue , 2008, Pages 207-212

Infrared absorption from low carbon concentration, low dose, annealed CZ silicon

Author keywords

Carbon; CZ silicon; Electron irradiation; He; Infrared absorption

Indexed keywords

COMPLEXATION; CONCENTRATION (PROCESS); ELECTRON IRRADIATION; INFRARED ABSORPTION; RAPID THERMAL ANNEALING; BIOLOGICAL RADIATION EFFECTS; CARBON; DEFECTS; HELIUM; LIGHT ABSORPTION; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; VANADIUM DIOXIDE;

EID: 38549144682     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper
Times cited : (5)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.