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Volumn 131-133, Issue , 2008, Pages 207-212
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Infrared absorption from low carbon concentration, low dose, annealed CZ silicon
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Author keywords
Carbon; CZ silicon; Electron irradiation; He; Infrared absorption
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Indexed keywords
COMPLEXATION;
CONCENTRATION (PROCESS);
ELECTRON IRRADIATION;
INFRARED ABSORPTION;
RAPID THERMAL ANNEALING;
BIOLOGICAL RADIATION EFFECTS;
CARBON;
DEFECTS;
HELIUM;
LIGHT ABSORPTION;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON;
VANADIUM DIOXIDE;
ABSORPTION LINES;
LOW CARBON CONCENTRATION;
LOW DOSE IRRADIATION;
CZ SILICON;
IR ABSORPTION;
LOW CARBON;
LOW DOSE;
SEMICONDUCTING SILICON;
ANNEALING;
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EID: 38549144682
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (5)
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References (12)
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